Title :
Preparaton of graphite-like carbon nitride thin film by CVD
Author :
Matsu, T. ; Yudasaka, X. ; Kikuchi, Ryota ; Baxendale, M. ; Ohki, Y. ; Yoshimura, Satoru
Author_Institution :
Matsushita Research Institute Tokyo, Inc.
Keywords :
Atomic layer deposition; Crystalline materials; Nitrogen; Organic materials; Paramagnetic materials; Spectroscopy; Temperature; Transistors; X-ray diffraction; X-ray scattering;
Conference_Titel :
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location :
Seoul, Korea
DOI :
10.1109/STSM.1994.835875
