Title :
Advancements in MM-Wave On-Wafer S-Parameter Verification
Author_Institution :
Cascade Microtech Eur. Ltd.
Abstract :
The paper presents new on-wafer probe capabilities which offer improved measurement repeatability and calibration accuracy in the WR-10 through WR-5 waveguide bands. New types of membrane probe tips to 220 GHz and new customized impedance standard substrates have been developed. These elements are incorporated in a family of wafer probes with improved repeatability and accuracy throughout the waveguide bands. Measured results will be presented in the paper
Keywords :
S-parameters; millimetre wave integrated circuits; waveguide components; WR-5 waveguide bands; impedance standard substrates; mm-wave on-wafer S-parameter verification; wafer probes; On wafer mm-wave measurements;
Conference_Titel :
MM-Wave Products and Technologies, 2006. The Institution of Engineering and Technology Seminar on
Conference_Location :
London
Print_ISBN :
0-86341-719-1
