DocumentCode

1906814

Title

Graphite thin film formation by chemical vapor deposition

Author

Yudasaka, M. ; Kikuchi, Ryota ; Matsui, Takashi ; Ohki, Y. ; Ota, E. ; Yoshimura, Satoru

Author_Institution

Yoshimura n -Electron Materials Project

fYear

1994

fDate

24-29 July 1994

Firstpage

583

Lastpage

583

Keywords

Argon; Chemical vapor deposition; Chemistry; Crystalline materials; Crystallization; Hydrocarbons; Sputtering; Substrates; Temperature; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on

Conference_Location

Seoul, Korea

Type

conf

DOI

10.1109/STSM.1994.835884

Filename

835884