Title :
Graphite thin film formation by chemical vapor deposition
Author :
Yudasaka, M. ; Kikuchi, Ryota ; Matsui, Takashi ; Ohki, Y. ; Ota, E. ; Yoshimura, Satoru
Author_Institution :
Yoshimura n -Electron Materials Project
Keywords :
Argon; Chemical vapor deposition; Chemistry; Crystalline materials; Crystallization; Hydrocarbons; Sputtering; Substrates; Temperature; Transistors;
Conference_Titel :
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location :
Seoul, Korea
DOI :
10.1109/STSM.1994.835884
