• DocumentCode
    1906961
  • Title

    A method to adjust the characteristics of field emission triodes using silicon needles

  • Author

    Kanechika, M. ; Mitsushima, Y.

  • Author_Institution
    Toyota Central R&D Labs. Inc., Aichi, Japan
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    15
  • Lastpage
    16
  • Abstract
    We show a simple method to adjust the characteristics of triodes using silicon needles. Moreover, it is shown that the etching amount could adjust the experimental characteristics of the triodes.
  • Keywords
    electron field emission; elemental semiconductors; etching; silicon; triodes; Si; anisotropic dry etching; field emission triodes; silicon needles; Anisotropic magnetoresistance; Anodes; Dry etching; Electrodes; Field emitter arrays; Needles; Resists; Silicon; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1222960
  • Filename
    1222960
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1906961