Title :
Self-aligned fabrication of gated organic nano-pillar cold cathode
Author :
Baba, A. ; Yoshida, T. ; Asano, T.
Author_Institution :
Center for Microelectron. Syst., Kyushu Inst. of Technol., Iizuka, Japan
Abstract :
We successfully fabricated a gated nano-pillar cold cathode using the self-aligned fabrication technique and field electron emission from the cold cathode was demonstrated. It was found that the turn-on voltage of the emitter was 30 V and emission current of the order of 10/sup -7/ A was obtained at the gate voltage of 50 V. This new type of micro cold cathode will be useful for display devices.
Keywords :
cathodes; electron field emission; field emitter arrays; nanostructured materials; nanotechnology; organic compounds; photoresists; spin coating; SiO/sub 2/; emission current; field electron emission; gated organic nanopillar cold cathode; self-aligned fabrication; turn-on voltage; Anodes; Apertures; Cathodes; Electrodes; Electron emission; Etching; Fabrication; Leakage current; Resists; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1222961
