Title :
Fabrication of PZT/ZnO Core-Shell Nanowires by Metalorganic Chemical Vapor Deposition
Author :
Fujisawa, Hiroyuki ; Iwamoto, Yukihide ; Nakashima, S. ; Shimizu, Maiko
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Hyogo, Himeji, Japan
Abstract :
We report on fabrication of Pb(Zr,Ti)O3 (PZT)/ZnO core-shell nanowires (NWs) on Pt/Ti/SiO2 membrane structure by metalorganic chemical vapor deposition (MOCVD). On the membrane structure, the diameter of ZnO NWs was smaller than those on Pt/Ti/SiO2/Si substrate. The growth temperature dependence of the diameter of ZnO NWs suggests that the difference in the diameter of ZnO NWs on the membrane and Pt/Ti/SiO2/Si substrate was caused by a lowering of the growth temperature on the membrane owing to insufficient heating. PZT was uniformly grown onto ZnO NWs on the membrane, and no distinct difference was observed in crystalline properties of PZT. These experimental results indicate that the crystalline properties of PZT/ZnO core-shell NWs on the membrane is as good as those on the surrounding area, and also open the door to novel NW-based piezoelectric vibration energy harvesters in combination with a mechanical resonance of "soft" substrate.
Keywords :
II-VI semiconductors; MOCVD; cores; lead compounds; membranes; nanofabrication; nanowires; semiconductor growth; wide band gap semiconductors; zinc compounds; MOCVD; NW; PZT-ZnO; Pt-Ti-SiO2-Si; core-shell nanowire fabrication; crystalline property; growth temperature dependence; insufficient heating; mechanical resonance; membrane structure; metalorganic chemical vapor deposition; piezoelectric vibration energy harvester; soft substrate; one-dimensional ferroelectric nanostructures; piezoelectric vibration energy harvester;
Conference_Titel :
Emerging Trends in Engineering and Technology (ICETET), 2012 Fifth International Conference on
Conference_Location :
Himeji
Print_ISBN :
978-1-4799-0276-7
DOI :
10.1109/ICETET.2012.18
