Title :
Internal structure and electrical properties of Ge quantum dot in single-electron transistors
Author :
Chen, K.H. ; Chen, I.H. ; Li, P.W.
Author_Institution :
Dept. of Electr. Eng., Nat. Central Univ., Chungli, Taiwan
Abstract :
We have developed a simple, manageable, and self-organized manner - thermally oxidizing SiGe nanocavity for precisely controlling Ge quantum dot (QD) number, position, and tunnel path, which is crucial for effective single-electron tunneling devices. The internal structure properties of Ge QDs were systematically characterized. The effectiveness of Ge QD placement is evidenced by high performance Ge QD single electron transistors (SETs), featuring with clear Coulomb staircase and Coulomb-blockade oscillation behaviors at room temperature.
Keywords :
Coulomb blockade; Ge-Si alloys; electric properties; elemental semiconductors; germanium; quantum dots; single electron transistors; tunnelling; Coulomb blockade oscillation; Coulomb staircase; Ge; SiGe; electrical properties; internal structure; quantum dot number; single electron transistors; single electron tunneling device; thermally oxidizing nanocavity; tunnel path; Cavity resonators; Electrodes; Logic gates; Quantum dots; Scanning electron microscopy; Silicon germanium; Tunneling;
Conference_Titel :
Silicon Nanoelectronics Workshop (SNW), 2010
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-7727-2
Electronic_ISBN :
978-1-4244-7726-5
DOI :
10.1109/SNW.2010.5562546