Title :
On the Temperature Dependence of Polysilicon Emitter Transistors
Author :
Doyle, Denis J. ; Lane, William A.
Author_Institution :
National Microelectronics Research Centre, University College, Cork, Ireland
Abstract :
This paper investigates the Ãf temperature behaviour of polysilicon emitter transistors with a view to understanding the device physics. Realigned polysilicon emitters are shown to behave as ideal single crystal transistors. Transistors with true polysilicon emitters exhibit a reduced temperature sensitivity of Ãf. This is thought to result from a potential barrier at the interface. This potential barrier is dependent on the polysilicon doping level.
Keywords :
Doping; Furnaces; Microelectronics; Photonic band gap; Physics; Rapid thermal annealing; Temperature dependence; Temperature measurement; Temperature sensors; Thermionic emission;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland