• DocumentCode
    1907399
  • Title

    Evaluation of adhesion materials for gold line-and-space surface plasmon antenna on SOI-MOS photodiode

  • Author

    Satoh, Hiroaki ; Matsuo, Yuki ; Inokawa, Hiroshi ; Ono, Atsushi

  • Author_Institution
    Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
  • fYear
    2010
  • fDate
    13-14 June 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna are evaluated based on the electromagnetic simulation. Furthermore, the rejection ratio for polarized light with silicon nitride (Si3N4) adhesion layer is analyzed.
  • Keywords
    MIS devices; photodiodes; silicon-on-insulator; SOI-MOS photodiode; adhesion material; electromagnetic simulation; gold line-and-space surface plasmon antenna; light sensitivity; polarized light; rejection ratio; silicon nitride adhesion layer; silicon-on-insulator metal-insulator-semiconductor photodiode; Absorption; Adhesives; Antennas; Gold; Gratings; Materials; Photodiodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Silicon Nanoelectronics Workshop (SNW), 2010
  • Conference_Location
    Honolulu, HI
  • Print_ISBN
    978-1-4244-7727-2
  • Electronic_ISBN
    978-1-4244-7726-5
  • Type

    conf

  • DOI
    10.1109/SNW.2010.5562555
  • Filename
    5562555
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1907399