Title :
Fabrication of CNT-FED panel using polymer insulator
Author :
Nishimura, K. ; Shen, Z. ; Fujikawa, M. ; Hosono, A. ; Hashimoto, N. ; Kawamoto, S. ; Watanabe, S. ; Nakata, S.
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
In this article, we have developed the gated CNT-FED fabrication process with the polymer insulator. CNTs which are lying down on the substrate are successfully activated with laser.
Keywords :
carbon nanotubes; field emission displays; flat panel displays; nanotube devices; polymer insulators; C; FED panel; FED panel fabrication; carbon nanotubes; laser; polymer insulator; Aggregates; Apertures; Electrodes; Etching; Fabrication; Plastic insulation; Polymer films; Powders; Printing; Solvents;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1222977
