DocumentCode
1907815
Title
2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303)
fYear
2002
fDate
11-13 June 2002
Abstract
Presents the front cover, front matter, and table of contents from the conference proceedings.
Keywords
DRAM chips; MMIC; VLSI; dielectric thin films; integrated circuit interconnections; integrated circuit manufacture; integrated circuit reliability; integrated memory circuits; lithography; permittivity; silicon-on-insulator; CMOS devices; CMOS reliability; DRAM cell technology; DRAM technology; RF/analog devices; SOI; Si; Si-SiO/sub 2/; VLSI technology; high-k gate dielectrics; interconnects; lithography/process technology; memory technology; nonvolatile memory; process technology; strained Si devices;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 2002. Digest of Technical Papers. 2002 Symposium on
Conference_Location
Honolulu, HI, USA
Print_ISBN
0-7803-7312-X
Type
conf
DOI
10.1109/VLSIT.2002.1015363
Filename
1015363
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