Title :
Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
Author :
Buser, R.A. ; Brugger, Juergen ; de Rooij, N.F.
Author_Institution :
Institute of Microtechnology, University of Neuchâtel, Breguet 2, CH-2000 NEUCHATEL, Switzerland
Abstract :
A monocrystalline silicon lever with an integrated silicon tip for a Force/Fiction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
Keywords :
Atomic force microscopy; Atomic measurements; Mechanical systems; Microelectronics; Resonance; Resonant frequency; Scanning probe microscopy; Shape; Silicon; Surface topography;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland
