DocumentCode
1907921
Title
Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements
Author
Linder, C. ; Grétillat, M. ; de Rooij, N.F.
Author_Institution
Institute of Microtechnology, University of Neuchâtel, Breguet 2, 2000 Neuchâtel, Switzerland
fYear
1991
fDate
16-19 Sept. 1991
Firstpage
411
Lastpage
414
Abstract
Two resonators with polysilicon microbeams as oscillating elements are presented. One oscillator is capacitively excitated and detected, the other one is electro-thermally activated and measured by means of piezoresistors. Sacrificial layer technology with different types of sacrificial dioxide (thermal and CVD) is applied for the fabrication of the free-standing polysilicon beams. Gain/phase measurements are performed to examine the frequency response of the resonators.
Keywords
Capacitors; Fabrication; Mechanical sensors; Piezoresistive devices; Resistors; Resonance; Resonant frequency; Silicon compounds; Substrates; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location
Montreux, Switzerland
Print_ISBN
0444890661
Type
conf
Filename
5435302
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