DocumentCode
1908060
Title
Characterization of enhanced field emission from HfC-coated Si emitter arrays through parameter extraction
Author
Nicolaescu, D. ; Sato, T. ; Nagao, M. ; Filip, V. ; Kanemaru, S. ; Itoh, J.
Author_Institution
Nanoelectron. Res. Inst., AIST, Tsukuba, Japan
fYear
2003
fDate
7-11 July 2003
Firstpage
93
Lastpage
94
Abstract
In this paper a HfC coating layer was deposited on the tips resulting in enhanced field emission properties. The field emission temporal evolution was measured in ultra-high vacuum conditions and also in O/sub 2/ and Ar gases of different concentration.
Keywords
elemental semiconductors; field emitter arrays; hafnium compounds; silicon; Ar gases; HfC-Si; HfC-coated Si emitter arrays; O/sub 2/ gases; emission parameter extraction; enhanced field emission properties; ultra high vacuum conditions; work function; Argon; Coatings; Data mining; Field emitter arrays; Gases; Helium; Hybrid fiber coaxial cables; Parameter extraction; Physics; Semiconductor device measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1222999
Filename
1222999
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