Title :
Recent Progress with Vertical Transistors
Author :
Risch, Lothar ; Aeugle, Thomas ; Rösner, Wolfgang
Author_Institution :
Siemens AG, Germany
fDate :
22-24 September 1997
Keywords :
CMOS logic circuits; CMOS technology; Doping; Epitaxial growth; Lithography; Low voltage; MOSFETs; Production; Random access memory; Transistors;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194377
