DocumentCode
1908590
Title
Planar Integration Technologies for Optoelectronic Integrated Circuits
Author
Allan, D.A. ; Herniman, J. ; Sullivan, P. J O ; Birdsall, P. ; Quayle, A
Author_Institution
Devices Division, British Telecom Laboratories, Martlesham Heath, Ipswich, IP5 7RE, United Kingdom.
fYear
1991
fDate
16-19 Sept. 1991
Firstpage
271
Lastpage
274
Abstract
The development of Optoelectronic Integrated Circuits (OEICs) using planar integration technologies for good yields of fine linewidth (1¿m) FETs and novel notch PIN diodes is discussed. In particular the horizontal integration of a GaAs MESFET circuit with a PIN diode is demonstrated and used to produce single and four channel receivers. These circuits have good sensitivities (-29.3dBm at 250Mbit/s) and represent state of the art levels of integration.
Keywords
Absorption; Contact resistance; Current measurement; Electrical resistance measurement; FETs; Gallium arsenide; Indium gallium arsenide; Integrated circuit technology; Lattices; MESFET integrated circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location
Montreux, Switzerland
Print_ISBN
0444890661
Type
conf
Filename
5435328
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