DocumentCode

1908931

Title

Study of pocket implant parameters for 0,18 um CMOS

Author

Schmitz, J. ; Ponomarev, Y.V. ; Montree, A.H. ; Woerlee, P.H.

Author_Institution

Philips Research Laboratories,The Netherlands

fYear

1997

fDate

22-24 September 1997

Firstpage

224

Lastpage

227

Keywords

Electron beams; Etching; Implants; Intrusion detection; Length measurement; Lithography; MOS devices; MOSFETs; Scanning electron microscopy; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

Print_ISBN

2-86332-221-4

Type

conf

DOI

10.1109/ESSDERC.1997.194406

Filename

1503336