DocumentCode
1908950
Title
Substrate surface effect on the fabrication of nanomagnets using spin-coating technique
Author
Chen, B.T. ; Ng, V. ; Adeyeye, A.O.
Author_Institution
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
fYear
2001
fDate
2001
Firstpage
71
Lastpage
74
Abstract
A simple method of depositing wide array of monolayers of 1 μm micron sized polystyrene latex particles using spin coating is presented. By comparing the results obtained on silicon (100) substrates and thermal oxide covered silicon, it was noticed that the oxide led to a marked increase in the area of monolayer array. Magnetic nanostructures were formed by deposition of a nickel layer followed by subsequent lift-off. Magnetic force microscopy results were discussed
Keywords
magnetic force microscopy; magnetic thin films; monolayers; nanostructured materials; nickel; spin coating; substrates; Ni; Si; lift-off; magnetic force microscopy; magnetic nanostructure; monolayer array; nanomagnet fabrication; nickel layer; polystyrene latex particles; silicon (100) substrate; spin coating; surface effect; thermal oxide; Coatings; Electrons; Fabrication; Lithography; Material storage; Nanostructures; Nickel; Silicon; Substrates; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location
Maui, HI
Print_ISBN
0-7803-7215-8
Type
conf
DOI
10.1109/NANO.2001.966396
Filename
966396
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