• DocumentCode
    1909002
  • Title

    Experimental studies on field emission characteristic of graphite

  • Author

    Zhao, K. ; She, J.C. ; Deng, S.Z. ; Jun Chen ; Xu, N.S.

  • Author_Institution
    State Key Lab. of Optoelectron. Mater. & Technol., Zhongshan Univ., Guangzhou, China
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    161
  • Abstract
    In the present paper, detail experimental studies on field electron emission characteristic of graphite nano-tip were reported. A precursor-free plasma enhanced chemical vapor deposition (PECVD) process was developed for graphite nano-tip arrays growth. N-type <100> Si chips were used as substrates. Scanning electron microscopy (SEM) observation results indicated that the tips were grown vertically on the substrate surface. The tip height and radius are typically /spl sim/100 nm and/spl sim/10 nm, respectively. Further transmission electron microscopy (TEM) image and electron microscopy (TEM) image and electron diffraction pattern demonstrated that the graphite nano-tip is crystalline graphite. The field emission properties of the graphite nano-tip arrays were measured in an ultra-high vacuum (10/sup -8/torr) chamber. A steel anode probe was employed for the testing. The testing results indicated that the graphite nano-tip arrays typically have relatively lower threshold field for field electron emission. Possible growth mechanisms of the graphite nano-tip and the effects of the tip morphology on the field emission properties were discussed.
  • Keywords
    electron diffraction; electron field emission; graphite; nanostructured materials; plasma CVD; scanning electron microscopy; transmission electron microscopy; 10 nm; 100 nm; C; PECVD; SEM; Si; Si chips; TEM; crystalline graphite; electron diffraction pattern; electron microscopy image; field electron emission; field emission properties; graphite; graphite nanotip arrays growth; plasma enhanced chemical vapor deposition; scanning electron microscopy; substrate surface; tip morphology; transmission electron microscopy; Chemical vapor deposition; Crystallization; Diffraction; Electron emission; Plasma chemistry; Plasma properties; Scanning electron microscopy; Surface morphology; Testing; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1223033
  • Filename
    1223033