• DocumentCode
    1909147
  • Title

    Nanometer Scale Lithography of Silicon and Titanium using Scanning Probe Microscopy

  • Author

    Dubois, E. ; Fontaine, P.A.

  • Author_Institution
    IEMN/ISEN, France
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    252
  • Lastpage
    255
  • Keywords
    Atomic force microscopy; Fabrication; Lithography; Scanning electron microscopy; Scanning probe microscopy; Semiconductor films; Silicon; Titanium; Voltage; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194413
  • Filename
    1503343
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1909147