DocumentCode
1909226
Title
Low stress Pd/Ge-based ohmic contacts for GaAs epitaxial-lift-off
Author
Pollentier, I. ; Zhu, Y. ; De Meulemeester, B. ; Van Daele, P. ; Demeester, P.
Author_Institution
University of Gent - IMEC, Laboratory of Electromagnetics and Acoustics, St. Pietersnieuwstraat 41, B-9000 Gent, Belgium
fYear
1991
fDate
16-19 Sept. 1991
Firstpage
153
Lastpage
156
Keywords
Conductivity; Contact resistance; Doping; Gallium arsenide; Gold; Inorganic materials; Ohmic contacts; Semiconductor process modeling; Stress; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location
Montreux, Switzerland
Print_ISBN
0444890661
Type
conf
Filename
5435351
Link To Document