Title :
Field emission from a polymeric precursor to diamond-like carbon (DLC)
Author :
Busta, H. ; Partee, C. ; Joray, S. ; Lang, T. ; Edwards, E. ; Feinerman, A.
Author_Institution :
Cabot Microelectron. Corp., Aurora, IL, USA
Abstract :
We have measured field emission from 0.2 /spl mu/m thick, smooth polymeric-based diamond-like films deposited on silicon wafers. The Raman spectra of these amorphous films show typical sp/sup 2/ (at about 1600 cm/sup -1/) graphitic bonds and a fair amount of sp/sup 3/ ( at about 1350 cm/sup -1/) bonds indicating the presence of diamond. I-E curve measured at 75/spl deg/C are also shown.
Keywords :
Raman spectra; amorphous state; diamond-like carbon; electron field emission; thin films; 0.2 micron; 1350 cm/sup -1/; 1600 cm/sup -1/; 75 degC; C; DLC; Raman spectra; Si; amorphous films; diamond-like carbon; field emission; polymeric based diamond-like films; silicon wafers; Current density; Microelectronics; Performance evaluation; Polymer films; Probes; Semiconductor films; Silicon; Surface topography; Testing; Tungsten;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223040
