Title :
Polyimide Optical Waveguide with Multi-Fan-Out for Multichip Module Application
Author :
Matsumoto, Takuji ; Fukuoka, Takeshi ; Kurino, Hiroyuki ; Koyanagi, Mitsmuasa
Author_Institution :
Tohoku University, Japan
fDate :
22-24 September 1997
Keywords :
Aluminum; Bonding; Copper; Large scale integration; Micromirrors; Multichip modules; Optical films; Optical interconnections; Optical waveguides; Polyimides;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194419
