Title :
Reexamination of Electron Mobility Dependence on Dopants in GaAs
Author :
Köpf, Ch ; Kaiblinger-Grujin, G. ; Kosina, H. ; Selberherr, S.
Author_Institution :
TU Vienna, Austria
fDate :
22-24 September 1997
Keywords :
Charge carrier processes; Electron mobility; Fourier transforms; Gallium arsenide; Impurities; Ionization; Microelectronics; Monte Carlo methods; Scattering; Semiconductor process modeling;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194426