A switching controller for fast nano-positioning control

Author

Wu, S.H. ; Perng, M.H.

Author_Institution

Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan

fYear

2001

fDate

2001

Firstpage

168

Lastpage

173

Abstract

To achieve fast nano-positioning control in a large traveling distance, this paper presents a simple switching rule and two controllers, one for macro-dynamics and the other for micro-dynamics, such that the moving stage can smoothly travel from macro- dynamic range into micro-dynamic range without a waiting time. First, a micro-dynamic model is proposed to capture the complicated hysteresis behavior of the nonlinear micro-dynamics. Next, two controllers of simple structures are designed for the micro-dynamic traveling range and the macro-dynamic travelling range, respectively, based on the previous model. Finally, a simple switching law is proposed to complete a design

Keywords

control system analysis; hysteresis; manipulator dynamics; micropositioning; modelling; nonlinear control systems; state feedback; switching; three-term control; PID control; fast nano-positioning control; hysteresis behavior; macro-dynamic range; micro-dynamic model; micro-dynamics range; nonlinear micro-dynamics; state feedback; switching controller; switching rule; Dynamic range; Friction; Hysteresis; Motion control; Motion measurement; Nanopositioning; Position measurement; Springs; Three-term control; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966413

Filename

966413