Title :
Dynamic laser beam testing of a n-MOS device
Author :
Bergner, H. ; Hempel, K. ; Krause, A. ; Stamm, U.
Author_Institution :
Friedrich Schiller University Jena, Faculty of Physics and Astronomy, Institute of Optics and Quantum Electronics, Max-Wien-Platz 1, O-6900 Jena, FRG
Abstract :
An IC consisting of a n-MOS inverter chain was investigated with the time-resolved OBIC method. The temporal shape of the electrical response to a 100 ps laser pulse and the propagation of the generated electrical pulse in the chain was studied.
Keywords :
Inverters; Laser beams; Laser excitation; Laser mode locking; Laser theory; Optical beams; Optical modulation; Optical pulse generation; Probes; Testing;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland
