Static behavior of a piezoelectric micro robot

Author

ROCHDI, Karima ; DEMBELE, Sounkalo

Author_Institution

Lab. d´´Automatique de Besancon, CNRS, Besancon, France

fYear

2001

fDate

2001

Firstpage

180

Lastpage

184

Abstract

This paper presents a study of the behavior of piezoelectric micro robot to three degrees of freedom (longitudinal movement, transversal movement and rotation) foreseen to work on flat surfaces. Its main merits are its ability to perform micro-scale displacements and to support heavy pre-loads. An adequate interface is developed, allowing the control of the system. Even, a phase sensitive vision method is developed to sense the position and the heading angle with an accuracy better than 0.2 pixel i.e. 12 μm with an observed field of about 4×3 cm². A personnel computer controls the whole system

Keywords

microactuators; micropositioning; microrobots; piezoelectric actuators; robot vision; flat surfaces; heavy pre-loads; interface; jump-stick-slip type; micro-positioning; micro-scale displacements; personnel computer control; phase sensitive vision method; piezoelectric micro robot; position measurement; three degrees of freedom; Ceramics; Control systems; Frequency; Friction; Micromotors; Personnel; Position measurement; Resins; Robot sensing systems; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966415

Filename

966415