Development of an electron optical instrument for evaluation of multi emitters-simultaneous observations of LEEM and FEEM image as well as PEEM and FEEM images

Author

Murata, H. ; Shimoyama, H. ; Kimura, T. ; Matsui, T. ; Mogami, A. ; Sakai, Y. ; Kudo, M. ; Kato, K. ; Betsui, K. ; Inoue, K.

Author_Institution

Meijo Univ., Nagoya, Japan

fYear

2003

fDate

7-11 July 2003

Firstpage

201

Abstract

Summary form only given. We have developed an electron optical instrument for evaluation of multi emitters such as field emitter arrays. The instrument is a versatile emission microscope and is cable of operating as an FEEM, an LEEM and a PEEM. The most important feature pf the instrument is the capability of simultaneous observation of LEEM and FEEM images as well as PEEM and FEEM images, thus enabling us to obtain quantitative knowledge as to the percentage of actually working emitters out of the whole emitters, stability of the emission current from each individual working emitter.

Keywords

field emission electron microscopes; field emitter arrays; electron optical instrument; emission current stability; emission microscope; field emitter arrays; multi-emitters; Electron emission; Electron optics; Field emitter arrays; Instruments; Laboratories; Optical arrays; Photoelectron microscopy; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Conference_Location

Osaka, Japan

Print_ISBN

4-8181-9515-4

Type

conf

DOI

10.1109/IVMC.2003.1223053

Filename

1223053