DocumentCode
1909649
Title
Determination of interface state density of ULSI n-MOSFET by 1/f noise measurements
Author
Villa, S. ; Geronimo, G. De ; Pacelli, A. ; Lacaita, A.L. ; Longoni
Author_Institution
Politecnico di Milano, Italy
fYear
1997
fDate
22-24 September 1997
Firstpage
332
Lastpage
335
Keywords
Attenuation measurement; Density measurement; Electron traps; Fluctuations; Interface states; Length measurement; MOSFET circuits; Noise measurement; Tellurium; Ultra large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194433
Filename
1503363
Link To Document