Title :
Determination of interface state density of ULSI n-MOSFET by 1/f noise measurements
Author :
Villa, S. ; Geronimo, G. De ; Pacelli, A. ; Lacaita, A.L. ; Longoni
Author_Institution :
Politecnico di Milano, Italy
fDate :
22-24 September 1997
Keywords :
Attenuation measurement; Density measurement; Electron traps; Fluctuations; Interface states; Length measurement; MOSFET circuits; Noise measurement; Tellurium; Ultra large scale integration;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194433