• DocumentCode
    1909841
  • Title

    Fabrication of carbon nanotubes array and its field emission property

  • Author

    Sato, H. ; Takegawa, H. ; Saito, Y. ; Yamaji, H. ; Miyake, H. ; Hiramatsu, K.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Mie Univ., Tsu, Japan
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    219
  • Lastpage
    220
  • Abstract
    In this paper, we employed the PE-CVD and a lift-off process using silicon substrates. Field emission from the CNT array, which was fabricated by means of this technique, was investigated.
  • Keywords
    carbon nanotubes; field emitter arrays; nanotechnology; nanotube devices; plasma CVD; C; Si; carbon nanotubes array; field emission; plasma enhanced CVD; silicon substrates; Carbon nanotubes; Fabrication; Field emitter arrays; Iron; Plasma chemistry; Plasma displays; Plasma properties; Silicon; Substrates; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1223062
  • Filename
    1223062
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1909841