DocumentCode
1909883
Title
Suppression of the Reverse Short Channel Effect in (Sub-)0.25um nMOSFETs using elevated S/D structures
Author
Schumann, D. ; Krieg, R. ; Fer, H. Sch ; Schwalke, U.
Author_Institution
Siemens AG, Germany
fYear
1997
fDate
22-24 September 1997
Firstpage
364
Lastpage
367
Keywords
Analog circuits; Annealing; CMOS process; Doping; Epitaxial growth; MOSFET circuits; Research and development; Seals; Silicidation; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194441
Filename
1503371
Link To Document