Title :
Optical testing of submicron-technology MOSFETs and bipolar transistors
Author :
Pogany, Dionyz ; Furbock, C. ; Seliger, N. ; Habas, P. ; Gornik, E.
Author_Institution :
TU Vienna, Austria
fDate :
22-24 September 1997
Keywords :
Bipolar transistors; Free electron lasers; Laser beams; MOSFETs; Optical interferometry; Optical modulation; Optical refraction; Optical variables control; Plasma temperature; Testing;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194443
