PHOMAG: a photolithography machine allocation game

Author

Chang, Shi-Chung ; Liu, Chung-Yang ; Hu, Ming-Der ; Wu, Hsim-Yi ; Wu, Hsin-Chen ; Chao, Cheng-Lin ; Chen, Ren-Cheng

Author_Institution

Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan

fYear

1997

fDate

6-8 Oct 1997

Abstract

In this paper, a computer simulation-based decision aid system is designed to serve as an interactive what-if analysis for dynamic allocation of photolithography machines in a fab. The system, PHOMAG, is featured by a full scale fab simulation model using ManSim^TM, incorporation of interactive user-defined/dispatching decision in the simulator using UserAccess^TM and a user friendly GUI on PC/Windows95_TM. PHOMAG has been implemented in the field with positive user feedback

Keywords

decision support systems; digital simulation; dispatching; graphical user interfaces; integrated circuit manufacture; photolithography; ManSim; PHOMAG; computer simulation-based decision aid system; dynamic allocation; full scale fab simulation model; interactive user-defined/dispatching decision; interactive what-if analysis; photolithography machine allocation game; user friendly GUI; Chaos; Computational modeling; Computer simulation; Fabrication; Flow production systems; Foundries; Graphical user interfaces; Lithography; Semiconductor device modeling; Workstations;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-3752-2

Type

conf

DOI

10.1109/ISSM.1997.664607

Filename

664607