A 34 GHz fT Bipolar Process with High-Energy-Implanted Collector

Author

Ponomarev, Y.V. ; Emons, C.H.H. ; van der Wel, W. ; van den Berg, M.A. ; Timmering, C.E. ; Janssen, A.C.L. ; Politiek, J.

Author_Institution

Philips Research Laboratories, The Netherlands

fYear

1997

fDate

22-24 September 1997

Firstpage

408

Lastpage

411

Keywords

Annealing; Crystalline materials; Epitaxial layers; Implants; Laboratories; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

Print_ISBN

2-86332-221-4

Type

DOI

10.1109/ESSDERC.1997.194452

Filename

1503382

Link To Document