• DocumentCode
    1910237
  • Title

    An investigation of polysilicon emitter bipolar transistors with an ozonized polysilicon/monosilicon interface

  • Author

    Niel, S. ; Hernandez, C. ; Pantel, R. ; Sagnes, I. ; Berenguer, M. ; Kirtsch, J. ; Monroy, A. ; Chantre, A. ; Vincent, G.

  • Author_Institution
    France Telecom, CNET, France
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    416
  • Lastpage
    419
  • Keywords
    BiCMOS integrated circuits; Bipolar transistors; Cleaning; Energy loss; Hafnium; MONOS devices; Microelectronics; Rapid thermal processing; Telecommunications; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194454
  • Filename
    1503384
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1910237