Title :
New Designs, Readout Concept and Simulation Approach of Micromachined Rate Gyroscopes
Author :
Geiger, W. ; Folkmer, B. ; Sandmaier, H. ; Lang, W.
Author_Institution :
HSG-IMIT, Germany
fDate :
22-24 September 1997
Keywords :
Bandwidth; Electrodes; Electrostatic levitation; Gyroscopes; Mechanical sensors; Micromachining; Oscillators; Q factor; Resonance; Springs;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194457
