New Designs, Readout Concept and Simulation Approach of Micromachined Rate Gyroscopes

Author

Geiger, W. ; Folkmer, B. ; Sandmaier, H. ; Lang, W.

Author_Institution

HSG-IMIT, Germany

fYear

1997

fDate

22-24 September 1997

Firstpage

428

Lastpage

431

Keywords

Bandwidth; Electrodes; Electrostatic levitation; Gyroscopes; Mechanical sensors; Micromachining; Oscillators; Q factor; Resonance; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

Print_ISBN

2-86332-221-4

Type

DOI

10.1109/ESSDERC.1997.194457

Filename

1503387

Link To Document