Title :
Integration of Vertical/Quasivertical DMOS, CMOS and Bipolar Transistors in a 50 V SIMOX Process
Author :
Weyers, J. ; Vogt, Hendrik ; Berger, Marcel ; Mach, Werner ; Mutterlein, B. ; Raab, M. ; Richter, Felix ; Vogt, Florian
Author_Institution :
Fraunhofer-Institute of Microelectronic Circuits and Systems, FinkenstraÃ\x9fe 61, D-W-4100 Duisburg I, FRG
Keywords :
Bipolar transistors; Bismuth; CMOS process; Design engineering; Electronic switching systems; Etching; Isolation technology; Large scale integration; Microelectronics; Tiles;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
