Title :
Fabrication of field emission triodes using carbon nanofibers
Author :
Liao, Y.F. ; She, J.C. ; Chen, J. ; Deng, S.Z. ; Xu, N.S.
Author_Institution :
State Key Lab. of Optoelectron. Mater. & Technol., Zhongshan Univ., Guangzhou, China
Abstract :
In this paper, we develop the technique for fabricating the field emitter arrays using carbon nanofibres as cathode material. Fabrication process by microwave plasma enhanced chemical vapor deposition (MPCVD).
Keywords :
carbon fibres; cathodes; field emitter arrays; nanostructured materials; plasma CVD; triodes; C; carbon nanofibers; cathode material; field emission triodes; field emitter arrays; microwave plasma enhanced chemical vapor deposition; Apertures; Carbon dioxide; Chromium; Fabrication; Field emitter arrays; Flat panel displays; Laboratories; Nanoscale devices; Nickel; Scanning electron microscopy;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223080
