DocumentCode
1910351
Title
Fabrication of field emission triodes using carbon nanofibers
Author
Liao, Y.F. ; She, J.C. ; Chen, J. ; Deng, S.Z. ; Xu, N.S.
Author_Institution
State Key Lab. of Optoelectron. Mater. & Technol., Zhongshan Univ., Guangzhou, China
fYear
2003
fDate
7-11 July 2003
Firstpage
255
Lastpage
256
Abstract
In this paper, we develop the technique for fabricating the field emitter arrays using carbon nanofibres as cathode material. Fabrication process by microwave plasma enhanced chemical vapor deposition (MPCVD).
Keywords
carbon fibres; cathodes; field emitter arrays; nanostructured materials; plasma CVD; triodes; C; carbon nanofibers; cathode material; field emission triodes; field emitter arrays; microwave plasma enhanced chemical vapor deposition; Apertures; Carbon dioxide; Chromium; Fabrication; Field emitter arrays; Flat panel displays; Laboratories; Nanoscale devices; Nickel; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223080
Filename
1223080
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