Title :
Fabrication of gated field emission arrays with aligned carbon nanotubes
Author :
Ding, M.Q. ; Xinghui Li ; Guodong Bai ; Fuquan Zhang ; Fujiang Liao
Author_Institution :
Beijing Vacuum Electron. Res. Inst., China
Abstract :
We have fabricated Spindt-type gated field emission arrays with vertically aligned CNTs emitters. A detailed fabrication process together with the growth and characterization of the aligned carbon nanotubes will be presented and discussed.
Keywords :
carbon nanotubes; field emitter arrays; plasma deposition; scanning electron microscopy; transmission electron microscopy; C; SEM; TEM; aligned carbon nanotubes; carbon nanotubes properties; spindt type gated field emission arrays fabrication; Carbon nanotubes; Diodes; Fabrication; Field emitter arrays; Flat panel displays; Plasma applications; Robustness; Scanning electron microscopy; Shape; Transmission electron microscopy;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223081
