DocumentCode
1910591
Title
A Novel Diffusion Coupled Oxidation Model
Author
Radi, M. ; Leitner, E. ; Hollensteiner, E. ; Selberherr, S.
Author_Institution
TU Vienna, Austria
fYear
1997
fDate
22-24 September 1997
Firstpage
472
Lastpage
475
Keywords
Analytical models; Boundary conditions; Chemicals; Deformable models; Microelectronics; Numerical models; Object oriented modeling; Oxidation; Silicon compounds; Stress;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194468
Filename
1503398
Link To Document