DocumentCode :
1910591
Title :
A Novel Diffusion Coupled Oxidation Model
Author :
Radi, M. ; Leitner, E. ; Hollensteiner, E. ; Selberherr, S.
Author_Institution :
TU Vienna, Austria
fYear :
1997
fDate :
22-24 September 1997
Firstpage :
472
Lastpage :
475
Keywords :
Analytical models; Boundary conditions; Chemicals; Deformable models; Microelectronics; Numerical models; Object oriented modeling; Oxidation; Silicon compounds; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
Type :
conf
DOI :
10.1109/ESSDERC.1997.194468
Filename :
1503398
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1910591
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