0.69 nm resolution ultrasonic motor for large stroke precision stage

Author

Egashira, Yoshiya ; Kosaka, Kouji ; Takada, Shinji ; Iwabuchi, Tetsuya ; Baba, Tetsuro ; Moriyama, Shiro ; Harada, Takashi ; Nagamoto, Keiichi ; Nakada, Akira ; Kubota, Hiroshi ; Ohmi, Tadahiro

Author_Institution

Graduate Sch. of Sci. & Technol., Kumamoto Univ., Japan

fYear

2001

fDate

2001

Firstpage

397

Lastpage

402

Abstract

This study reports the application of the non-resonant type ultrasonic motor (NRUSM) to a 300 mm-stroke ultra-precision stage for the future nanoelectronics manufacturing. The advantages of the NRUSM are high resolution and no magnetic noise generation due to the DC characteristics of the piezoelectric device, and high servo rigidity and no additional brake mechanism needed due to direct drive mechanism. It is confirmed that the NRUSM is suitable for ultra-precision positioning, slow and high velocity feeding at closed-loop control. The NRUSM driven stage performance results are; (1) maximum velocity 50 mm/s over the 300 mm-stroke at open-loop control; (2) positioning accuracy of ±0.69 nm at step and repeat response, and position accuracy at constant velocity feeding 10 nm/s ~36 mm/s below 20 nm at closed-loop control

Keywords

nanotechnology; position control; ultrasonic motors; 0.69 nm; 300 mm; 50 mm/s; DC characteristics; closed-loop control; drive mechanism; feed mechanism; high-resolution device; large-stroke ultra-precision stage; nanoelectronics manufacturing; nonresonant type ultrasonic motor; open-loop control; piezoelectric device; positioning accuracy; servo rigidity; Character generation; DC generators; Magnetic noise; Manufacturing; Micromotors; Nanoelectronics; Open loop systems; Piezoelectric devices; Servomotors; Velocity control;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966455

Filename

966455