Title :
Very short TAT ULSI trial manufacturing line construction
Author :
Kato, Shigeki ; Suzuki, Tsuyoshi ; Yamazaki, Kenzo ; Nakamura, Masaru
Author_Institution :
LSI Manufacturing Div., NEC Corp., Sagamihara, Japan
Abstract :
The LSI manufacturing division manufactures leading-edge trial products to support the semiconductor business of NEC. As LSI design rules are rapidly becoming finer, short turn-around time (TAT) is becoming an important subject in order to create new products as quickly as possible. Under these circumstances, we established a system of improvement based on total productive maintenance (TPM) to achieve 100% customer satisfaction, with priority on very short TAT and success on the first run
Keywords :
ULSI; integrated circuit manufacture; maintenance engineering; quality control; NEC; TAT; ULSI; customer satisfaction; design rules; leading-edge trial products; total productive maintenance; trial manufacturing line construction; Customer satisfaction; Humans; Large scale integration; Lead compounds; Manufacturing; National electric code; Personnel; Semiconductor device manufacture; Total quality management; Ultra large scale integration;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
DOI :
10.1109/ISSM.1997.664610
