Title :
Electrical modelling of Kelvin structures for the derivation of low specific contact resistivity
Author :
Reeves, Geoffrey K. ; Holland, Anthony S. ; Harrison, Barry ; Leech, Patrick W.
Author_Institution :
Royal Melbourne Institute of Technology, Melbourne, Australia
fDate :
22-24 September 1997
Keywords :
Bridge circuits; Conductivity; Contact resistance; Electrical resistance measurement; Error correction; Kelvin; Ohmic contacts; Resistors; Semiconductor device testing; Semiconductor process modeling;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194473
