DocumentCode
1910869
Title
Energy spread measurement of electrons from field emitter array for ion beam neutralization
Author
Ishikawa, J. ; Gotoh, Y. ; Nakamura, K. ; Tsuji, H. ; Matsuda, K. ; Nagai, N. ; Sakai, S. ; Ikejiri, T. ; Umisedo, S. ; Hamamoto, N.
Author_Institution
Dept. of Electron. Sci. & Eng., Kyoto Univ., Japan
fYear
2003
fDate
7-11 July 2003
Firstpage
297
Lastpage
298
Abstract
In this paper, the use of a field emitter array as an electron source for the charge neutralization of ion beam was proposed. Si was preferred as an emitter material because minimum contamination was expected for the preparation of silicon devices such as LSI. The energy spread of the extracted electrons from electron source were measured.
Keywords
electron sources; elemental semiconductors; field emitter arrays; semiconductor devices; silicon; LSI; Si; charge neutralization; electron source; electrons energy spread measurement; field emitter array; ion beam neutralization; silicon devices; Contamination; Electron beams; Electron emission; Electron sources; Energy measurement; Field emitter arrays; Ion beams; Large scale integration; Pollution measurement; Silicon devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223101
Filename
1223101
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