Title :
Field evaporation of the carbonized tungsten tips
Author :
Golubev, Oleg L. ; Loginov, Michail V. ; Shrednik, V.N.
Author_Institution :
A.F. Ioffe Phys. Tech. Inst., Acad. of Sci., St. Petersburg, Russia
Abstract :
In this paper, field evaporation of edge crystal was studied by means of atom probe at various tip temperatures T: cryogenic, room and the high temperatures T=1300-1600 K. The tips in form of edge crystal were produced insitu by heating of the tips at the T=1700 K in the presence of hydrocarbons and high electric field F.
Keywords :
field evaporation; heat treatment; tungsten; 1300 to 1600 K; 1700 K; 293 to 298 K; W; atom probe; carbonized tungsten tips; edge crystal; electric field; field evaporation; heating; hydrocarbons; room temperature; Atomic measurements; Cryogenics; Electrons; Hydrocarbons; Iron alloys; Microscopy; Probes; Resistance heating; Temperature; Tungsten;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223105
