• DocumentCode
    1911256
  • Title

    Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process

  • Author

    Nagaura, Y. ; Nagaura, Z. ; Nagaura, K. ; Nagato, K. ; Emoto, K. ; Imani, K. ; Kinoshita, K. ; Yokomizo, S. ; Nakazawa, M.

  • Author_Institution
    Nagaura Lab. Inc., Fukuoka, Japan
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    528
  • Lastpage
    533
  • Abstract
    Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape were successfully manufactured by the chemical etching processes
  • Keywords
    crystal resonators; etching; SiO2; chemical etching process; double-sided grooved type resonators; quartz resonators; single-sided grooved type resonators; Chemical industry; Chemical processes; Chemical technology; Cities and towns; Coaxial components; Electric variables; Etching; Frequency; Manufacturing processes; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
  • Conference_Location
    Maui, HI
  • Print_ISBN
    0-7803-7215-8
  • Type

    conf

  • DOI
    10.1109/NANO.2001.966479
  • Filename
    966479
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1911256