Performance evaluation of run-to-run control methods in semiconductor processes

Author

Zhang, Chang ; Deng, Hao ; Baras, John S.

Author_Institution

Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD, USA

Volume

2

fYear

2003

fDate

23-25 June 2003

Firstpage

841

Abstract

Run-to-run (RtR) control plays an important role in semiconductor manufacturing processes. In this paper, RtR control methods are classified and evaluated. The set-valued RtR controllers with ellipsoid approximation are compared with two typical RtR controllers: the exponentially weighted moving average (EWMA) controller and the optimizing adaptive quality controller (OAQC) by simulations according to the following criteria: a good RtR controller should be able to compensate for various disturbances, such as small drifts, step disturbances and model errors; moreover, it should be able to deal with bounds, cost requirement and multiple targets that are often encountered in semiconductor processes. Based on our simulation results, suggestions on selection of a proper RtR controller for a semiconductor process are given as conclusions.

Keywords

adaptive control; approximation theory; closed loop systems; cost optimal control; moving average processes; quality control; semiconductor technology; set theory; statistical process control; cost requirement; disturbance compensation; ellipsoid approximation; exponentially weighted moving average controller; model errors; multiple targets; optimizing adaptive quality controller; run-to-run control methods; semiconductor manufacturing processes; set-valued controllers; small drifts; step disturbances; Adaptive control; Control systems; Cost function; Educational institutions; Ellipsoids; Error correction; Manufacturing processes; Process control; Programmable control; Semiconductor process modeling;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Applications, 2003. CCA 2003. Proceedings of 2003 IEEE Conference on

Print_ISBN

0-7803-7729-X

Type

conf

DOI

10.1109/CCA.2003.1223119

Filename

1223119