• DocumentCode
    1911433
  • Title

    Stress induced leakage current dependence on oxide thickness, technology and stress level

  • Author

    Scarpa, A. ; Ries, P. ; Ghibaudo, G. ; Paccagnella, A. ; Pananakakis, G. ; Brini, J. ; Ghidini, G. ; Papadas, C.

  • Author_Institution
    Università di Padova, Italy
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    592
  • Lastpage
    595
  • Keywords
    Current density; Degradation; Electrons; Kinetic theory; Leakage current; Microelectronics; Predictive models; Research and development; Stress measurement; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194498
  • Filename
    1503428
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1911433