Preparation and research on performance of multi-layer Bi/Sb composite nano-film

Author

Dai Jingjing ; Wang Xuesheng ; Shu Min ; Qi Xuegui

Author_Institution

Sch. of Mech. & Power Eng., East China Univ. of Sci. & Technol., Shanghai, China

Volume

2

fYear

2011

fDate

20-22 May 2011

Firstpage

1228

Lastpage

1231

Abstract

In this paper, the preparation techniques of multi-layer Bi/Sb composite semiconductor nano-film were developed with single-crystal silicon as thermal insulation substrate and Bi/Sb as sputter targets using magnetron sputtering. Four kinds of semiconductor nano-film were fabricated with the different Bi/Sb modulation ratios which respectively equaled 1:4, 3:2, 4:1, 1:4 and the modulation period was fixed on 40nm. And then, the Seebeck coefficient, electric conductivity and power factor of the semiconductor nano-film were tested with the variation of temperature which ranged from 160K to 250K. The experimental results indicated that the Seebeck coefficient and the power factor reached the maximum values of 2.48μV/K and 26.5μW/mK² at 235K.

Keywords

Seebeck effect; antimony; electrical conductivity; multilayers; nanostructured materials; semiconductor thin films; sputter deposition; thermal insulating materials; Bi-Sb; Seebeck coefficient; electric conductivity; magnetron sputtering; multilayer composite nanofilm; power factor; semiconductor nanofilm; sputter target; temperature 160 K to 250 K; thermal insulation substrate; Bismuth; Educational institutions; Modulation; Q measurement; magnetron sputtering; nano-film; thermoelectric materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Materials for Renewable Energy & Environment (ICMREE), 2011 International Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-61284-749-8

Type

conf

DOI

10.1109/ICMREE.2011.5930558

Filename

5930558