Conducting organic thin films by ion-assisted evaporation and their applications to electronic devices and components

Summary form only given. Recently organic thin films have been widely used as electronic elements, sensors, coatings, protectors, lithographic layers, etc. Among various methods for preparation of thin films, an evaporation technique under vacuum is one of the most simple and convenient methods. In this study, we applied a new technique, ion-beam-assisted deposition, utilizing ion beam irradiation during the preparation of the organic thin films by evaporation. As an example, thin films of charge transfer complex have been prepared on porous oxide Al plates by means of evaporation under ion beam irradiation. A solid electrolytic capacitor with a large capacitance per unit area and a good frequency response can be fabricated using their thin films. Applications of these films by ion-assisted deposition to other electronic devices are also discussed.